What you need is very specific to semiconductors because you have heavy constraints on the reaction, usually like: the reactants and products should be gases, leave no trace of sodium in the semicon and be extremely pure, leave no compound at the surface, possibly etch along crystal directions or etch only one doping...
Your answers are in the semiconductor research literature. You'll find them on a website only if semiconductor researchers put them there, but reviews, which also exist online, use to be expensive. You may try at ArXiv if papers were published there.