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Topic: FTIR analysis of Silicon nitride films  (Read 3513 times)

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Offline prsharan

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FTIR analysis of Silicon nitride films
« on: August 02, 2011, 01:15:51 AM »
Hello every one,
I am just starting with FTIR technique. I have to analyse a-SiN:H films to determine Si-H, N-H bond densities. Can any one please guide me how to calculate bond density.

Thank you.

Offline marquis

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Re: FTIR analysis of Silicon nitride films
« Reply #1 on: August 10, 2011, 12:47:27 PM »
As a starting point, what do you have to set up a calibration curve with?  Do you know the percentage of each component?

Don't know what kind of samples you will be analyzing. We ran into Si:N films mostly as a mold coating, which made analysis difficult.

If you have a polymer or plastic film, you can try ATR (attenuated total reflectance) for the analysis.  You may also hear this called MIR (multiple internal reflectance).  Trying to do transmittance analysis could be tricky, but it is possible.

Good luck.

Offline prsharan

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Re: FTIR analysis of Silicon nitride films
« Reply #2 on: August 23, 2011, 02:29:13 AM »
Thank you very much :)

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