Thank you so much for the answers!
First of all, oxygen plazma did not help either.
The reason why I want to dissolve the coating is to clean a Phase mask, somwhat simmilar to the ones used in creating semiconductors.
Some of the coating got evaporated on to the phase mask during the laser etching process. The phase mask is very fragile thing, so no mechanical cleaning what so ever.
I rulled out using a torch to clean it, might cause more dammage.
The problem is, I am not sure what the coating is really made of since, the manufacturer, only states, it is made of UV-cured Acrylic.
Any other suggestions? I am willing to try anything that I can, since this is key to my research.
It might not be the case, but could the UV-cured Acrylic, change somewhat during the evaporation?
Thank you so much!