The vapour pressure of carbon is tiny, so would CVD or other methods transport carbon vapour? The usual trick is rather to transport one or two compounds, gaseous or easily evaporated, that react on the target surface to produce the desired coating.
A carbon compound looks like a better way to obtain pure carbon by decomposition. Graphite for instance has not nearly the purity expected from thin films and semiconductors.
Even for silica SiO2, regular purity is obtained from natural quartz crystals chosen by lack of colour (you won't take diamond?) and fused, while high purity reacts silane SiH4 and O2.