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Topic: Is there anybody who work on Lithography?  (Read 2300 times)

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Offline hyuazaxi

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Is there anybody who work on Lithography?
« on: February 11, 2009, 09:39:53 AM »
Hello everyone
 now i am study as a Ph.D candidate in Korea.i am working on AFM lithography.so i want to ask find somebody who do the same work as me and discuss with him.
if you do lithography, please contact with me.

yibinsong@gmail.com

Offline P

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Re: Is there anybody who work on Lithography?
« Reply #1 on: February 12, 2009, 06:41:54 AM »
I've done e-beam and UV microlithography on Si wafers with positive and negative resists.  AFM lithography sounds like it is alot finer  -  moving around individual atoms, a bit like that famous photo of IBM written in atoms.  My PhD was about designing the resist material to respond better to the e-beam, to give better sensitivity and contrast and finer details under e-beam.  Is your field more physics or chemistry?  I wrote a 0.1 micron line with a 10:1  aspect ratio with a e-beam in a negative resist.
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