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Topic: Chrome Wet Etching without using Ceric Ammonium Nitrate  (Read 2971 times)

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Offline junoso

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Chrome Wet Etching without using Ceric Ammonium Nitrate
« on: October 01, 2011, 12:54:30 PM »
Hello,

I'm working on a new chrome wet etchant that does not use ceric ammonium nitrate. We've been ceric ammonium nitrate for a while, but the prices are now sky high. I need to etch chromium(VI) oxide and chrome zero without affecting the positive photoresist on the photomask. Does anyone have any input for a etchant that doesn't use ceric ammonium nitrate? I've tried everything from HCl, HNO3, periodic acid. KMNO4 with KOH works, but it etches the positive photoresist, so I can't use that unless I can make it less powerful. Any help is greatly appreciated!!!


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