It's been awhile since I attended trade shows where the Auger guys showed off their products and hinted at prices but about 10 years ago we looked into buying one large enough to handle 300mm wafers and detect carbon (they called it an "environmental" version). If I recall the price at that time was about $250K + required a full time tech for that particular setup. I would guess you could probably get one today for about $75k.
But instead of relying on my guess, I'd suggest you google labs that offer Auger testing and ask them.